Imec news

Archive 2004



BILTHOVEN, THE NETHERLANDS, October 11, 2004 - ASM International N.V. (NASDAQ: ASMI and Euronext Amsterdam: ASM) announced today that it has entered into an agreement with IMEC, Europe’s leading independent nanoelectronics and nanotechnology research center, to deliver a full suite of its most advanced 300mm Front-end-of-the-Line semiconductor wafer processing equipment to IMEC, and to participate in several of IMEC’s research programs as a strategic partner. The equipment is expected to be delivered in 4th quarter 2004 and 2005.  The strategic partnership agreement includes participation for three years in IMEC’s 300mm, sub-45 nm related technology development programs. 

The Front-end-of the-Line, 300mm equipment includes a Polygon® ALCVD™ system for Atomic Layer Deposition of gate insulators and gate electrodes, a Levitor® Rapid Thermal Processing system for the formation of junctions and contacts in very small sub-45 nm transistors, and an Epsilon® Epitaxy system for the formation of advanced transistor structures with improved current carrying capability.  The equipment also includes the A412™ vertical furnace, for general, multiple applications in the IMEC pilot line.

“IMEC will use  this equipment to research very advanced devices with feature sizes of 45 nm and less, employing new materials, new structures and new processing methods” says Ivo Raaijmakers, Chief Technology Officer and Director of R&D of ASM International’s Front-end Operations.  “Together, the equipment set can be used to produce almost all materials for transistor and memory structures foreseen in the nanotechnology era”, he added.

ASM International has had a presence on the IMEC premises since 1994, when it moved its European demonstration and process research laboratories to Leuven.  ASM Belgium was incorporated as a research center in 2000.  ASM Belgium, IMEC researchers and IMEC’s partner researchers will jointly realize the required processing capability for the sub-45 nm devices.   

 “The extension of our long term partnership with IMEC by participation in these research programs allows us to refine and test our equipment well ahead of the production needs of our customers.”, said Arthur del Prado, CEO and President of ASM International.  “This is expected to allow faster introduction of enabling new technologies in the market”, he commented.

About ASM

With headquarters in Bilthoven, the Netherlands, ASM International N.V., and its subsidiaries  design and manufacture equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for wafer processing (Front-end segment) as well as assembly and packaging (Back-end segment) through facilities in the United States, Europe, Japan and Asia. ASM International's common stock trades on NASDAQ (symbol ASMI) and the Euronext Amsterdam Stock Exchange (symbol ASM). For more information, visit ASMI's website at

Safe Harbor Statement under the U.S. Private Securities Litigation Reform Act of 1995: All matters discussed in this statement, except for any historical data, are forward-looking statements. Forward-looking statements involve risks and uncertainties that could cause actual results to differ materially from those in the forward-looking statements. These include, but are not limited to, economic conditions and trends in the semiconductor industry generally currency fluctuations, the timing of significant orders, market acceptance of new products, competitive factors, litigation involving intellectual property, shareholder and other issues, commercial and economic disruption due to terrorist activity, armed conflict or political instability and other risks indicated in the Company's filings from time to time with the U.S. Securities and Exchange Commission, including, but not limited to, the Company's report on Form 20-F for the year ended December 31, 2003 and Forms 6-K as filed.

Contacts :

Robert L. de Bakker, + 31 30 229 85 40
Erik Kamerbeek + 31 30 229 85 00
Mary Jo Dieckhaus, + 1 212 986 29 00

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