Services
Imec Center for Advanced Metrology Solutions
Welcome to the Imec Center for Advanced Metrology Solutions (CAMS). Imec CAMS draws on the extensive experience of imec to offer a high quality scanning spreading resistance microscopy service. Furthermore, we also offer related products and solutions to enable and support electrical based AFM in your lab, including full diamond probes, calibration standards, training services and research partnerships.
Imec CAMS aims to be a reliable and trustworthy partner for in-depth electrical characterization of a wide variety of semiconductor structures.
Thank you for your interest in our Center.
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Imec CAMS provides high-resolution quantitative carrier distributions in 1D, 2D & 3D semiconductor structures, based on Scanning Spreading Resistance Microscopy (SSRM).
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The Imec CAMS diamond AFM tips are made from solid boron-doped polycrystalline diamond. These tips are the enabler for high-resolution electrical AFM measurements requiring high forces, such as Scanning Spreading Resistance Microscopy (SSRM).
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The Imec CAMS calibration standards are suited for the calibration of quantitative electrical measurements, while the resolution qualification standards are developed for evaluating the resolution of scanning probe and imaging techniques.
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Imec CAMS offers extensive tailor made training to introduce SSRM into your lab and can be your partner for applying AFM-based metrology to new devices and materials, and implementing novel characterization concepts.